Symptom: Inclusion, delamination, fish eyes

Possible Causes: What could cause this problem?

Poor processing, contamination

Sample Testing Plan: How do you measure?

  • 1. Isolation of included contaminants
  • 2. Sample cross-sectioning to view layers
  • 3. Perform microscopic analysis:
    a. FT-IR: ≥5 μm
    b. Dispersive Raman: ≥1 μm

Data Analysis Plan: How do you identify the problem?

  • 1. Search libraries to identify contamination
  • 2. Change process to avoid contamination